Table 1.
Results of the mirror assembly surface error and rigid body displacement.
| Gravity direction | Mirror error (rms) | Displacement | Tilt angle |
|---|---|---|---|
| X | 6.17 nm | 1.77 μm | 1″ |
| Z | 2.93 nm | 0.48 μm | 0″ |
It can be seen from Table 1 that under the X direction gravity load, the mirror error is 6.17 nm(λ/102), the displacement is 1.77 μm, and the tilt angle is 1''. Under the Z gravity load, the mirror error is 2.93 nm(λ/215), the displacement is 0.48 μm, and the tilt angle is 0''. That meets the system requirements.